the proton MAF is like a box rite? inside this box is the aluminium honeycomb filter-like thingy...this is just to straighten air flow and is not the sensor itself...the sensor itself is like a small electronic component behind/after the honeycomb...
you can clean the honey comb, but be careful not to bend/crumple it...it has to be straight to straighten the airflow that is flowing past the sensor...
clean the little electronic component, the sensor itself, also...use video head cleaner spray...spray from front and back, and let it dry off...it is adviced not to scrub/rub/wipe it (unless extremely dirty with stubborn deposits sticking). also do not use strong solvents...carb cleaner maybe be too strong...
use video head cleaner spray...
one more thing...don;t bother running the car without the honeycomb thingy...it messes up everything. it has to be in there...a must to have it to straighten the air flow.